Simulation of multiple scattering background in heavy ion backscattering spectrometry

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 149, Issue 4, 1999, Pages 460-468

  Li, M M ^a   O'Connor, D J ^a  

^a UNIVERSITY OF NEWCASTLE   (Australia)

Author keywords

02.50.N; 07.05.T; Monte Carlo simulation; Multiple scattering

Indexed keywords

HEAVY ION BACKSCATTERING SPECTROMETRY; ION SCATTERING;

BACKSCATTERING; COMPUTER SIMULATION; CRYSTAL IMPURITIES; GOLD; HEAVY IONS; METALLIC FILMS; MONTE CARLO METHODS; SILICON WAFERS; SPECTROMETRY; SUBSTRATES; TARGETS;

HIGH ENERGY PHYSICS;

EID: 0033098880     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00937-9     Document Type: Article

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