Structural study of metastable (GaAs)1-x(Ge2)x thin films grown by RF magnetron sputtering

Journal of Crystal Growth

Volumn 197, Issue 4, 1999, Pages 783-788

  Salazar Hernandez B ^a   Vidal, M A ^a   Constantino, M E ^a   Navarro Contreras, H ^a   Asomoza, R ^b   Merkulov, A ^b  

^a INSTITUTO DE INVESTIGACIÓN EN COMUNICACIÓN ÓPTICA   (Mexico)

^b DEPARTAMENTO DE FÍSICA   (Mexico)

Author keywords

Metastables alloys; Sputtering; Structural transition; X ray diffraction

Indexed keywords

EPITAXIAL GROWTH; FILM GROWTH; LATTICE CONSTANTS; MAGNETRON SPUTTERING; PHASE TRANSITIONS; SECONDARY ION MASS SPECTROMETRY; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTOR GROWTH; THIN FILMS; X RAY CRYSTALLOGRAPHY;

VEGARD'S LAW;

SEMICONDUCTING FILMS;

EID: 0033097072     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(98)00958-0     Document Type: Article

References (30)

1. J.E. Greene, J. Vac. Sci. Technol. A 5 (4) (1987) 1947.
2. B. Kramer, G. Tomasch, J.E. Greene, L. Salvati, T.L. Barr, M.A. Ray, Phys. Rev. B 46 (3) (1992) 1372.
3. R. Osório, S. Froyen, Phys. Rev. B 47 (4) (1993) 1889.
4. Zh.I. Alferov, M.Z. Zhingarev, S.G. Konnikov, I.I. Mokan, V.P. Ulin, V.E. Umanskii, B.S. Yavich, Sov. Phys. Semicond. 16 (5) (1982) 532.
5. S.A. Barnett, M.A. Ray, A. Lastras, B. Kramer, J.E. Greene, P.M. Raccah, L.L. Abels, Electron. Lett. 18 (20) (1982) 891.
6. I. Banerjee, D.W. Chung, H. Kroemer, Appl. Phys. Lett. 46 (5) (1985) 494.
7. Y.W. Kim, D.H. Mei, D. Lubben, I. Robertson, J.E. Greene, J. Appl. Phys. 76 (3) (1994) 1644.
8. A. Lastras-Martínez, G. Rodriguez-Pedroza, D.H. Mei, B. Kramer, D. Lubben, J.E. Greene, Phys. Rev. B 43 (17) (1991) 14035.
9. S.I. Shah, B. Kramer, S.A. Barnett, J.E. Greene, J. Appl. Phys. 59 (5) (1986) 1482.
10. L.T. Romano, J.E. Sundgren, S.A. Barnett, J.E. Greene, Superlattice Microstruct. 2 (1986) 233.
11. B. Salazar-Hernández, M.A. Vidal, H. Navarro-Contreras, R. Asomoza, A. Merkulov, Appl. Phys. Lett. 72 (1) (1998) 94.
12. K.E. Newman, A. Lastras-Martinez, B. Kramer, S.A. Barnett, M.A. Ray, J.D. Dow, J.E. Greene, P.M. Raccah, Phys. Rev. Lett. 50 (9) (1983) 1466.
13. M.I. D'yakonov, M.E. Raikh, Sov. Phys. Semicond. 16 (5) (1982) 570.
14. K.E. Newman, J.D. Dow, Phys. Rev. B 27 (12) (1983) 7495.
15. H. Holloway, L.C. Davis, Phys. Rev. Lett. 53 (8) (1984) 830.
16. E.A. Stern, F. Ellis, K. Kim, L. Romano, S.I. Shah, J.E. Greene, Phys. Rev. Lett. 54 (1985) 905.
17. K. Kim, E.A. Stern, Phys. Rev. B 32 (2) (1985) 1019.
18. L.C. Davis, H. Holloway, Phys. Rev. B 35 (6) (1987) 2767.
19. H. Holloway, L.C. Davis, Phys. Rev. B 35 (8) (1987) 3823.
20. B.L. Gu, K.E. Newman, P.A. Fedders, Phys. Rev. B 35 (17) (1987) 9135.
21. B.L. Gu, J. Ni, J.L. Zhu, Phys. Rev. B 45 (8) (1992) 4071.
22. W.J. Bartels, W. Nijman, J. Crystal Growth 44 (1978) 518.
23. P.F. Fewster, C.J. Curling, J. Appl. Phys. 62 (10) (1987) 4154.
24. B.R. Bennett, J.A. del Alamo, J. Electron. Mater. 20 (12) (1991) 1075.
25. M. Fatemi, R.E. Stahlbush, Appl. Phys. Lett. 58 (8) (1991) 825.
26. H.J. McSkimin, A. Jayaraman, P. Andreatch, T.B. Bateman, J. Appl. Phys. 39 (1968) 4127.
27. H.J. McSkimin, P. Andreatch Jr., J. Appl. Phys. 34 (1963) 651.
28. B.E. Warren, X-ray Diffraction, Addison-Wesley, Reading, MA, 1969, p. 206.
29. K. Wolf, S. Jilka, H. Sahin, H. Stanzl, T. Reisinger, A. Naumov, W. Gebhardt, J. Crystal Growth 152 (1995) 34.
30. M.A.G. Halliwell, J. Crystal Growth 170 (1997) 47.