Integrated micro focusing and tracking sensor

Journal of Micromechanics and Microengineering

Volumn 9, Issue 1, 1999, Pages 71-77

  Sawada, R ^a   Shimada, J ^a   Higurashi, E ^a   Ito, T ^a  

^a NTT CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; MICROELECTRONIC PROCESSING; OPTICAL INSTRUMENT LENSES; PHOTODIODES; REFRACTIVE INDEX; SEMICONDUCTOR LASERS; SERVOMECHANISMS;

GRADED REFRACTIVE INDEX; MICROLENSES; MONOLITHICALLY FABRICATED PHOTODIODES; SERVO ACTUATOR;

MICROSENSORS;

EID: 0033096839     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/9/1/309     Document Type: Article

References (8)

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2. Ito T, Sawada R and Higurashi E 1997 Integrated micro laser Doppler velocimeter Digest Tech. Papers IEEE Int. Conf. on Micro-Opto-Electro-Mechanical Syst. (MOEMS '97), Nara, Japan pp 29-32
3. Sawada R, Higurashi E, Ito T, Tsubamoto M and Ohguchi O 1997 Integrated micro-laser displacement sensor Digest Tech. Papers IEEE Ann. Int. Workshop on Micro-Electro-Mechanical Syst. (MEMS' 97), Nagoya, Japan pp 19-23
4. Shimada J, Ohguchi O, Sawada R, Tanaka H and Watabe A 1994 Integrated coupling device between a laser diode and an optical fiber using a microlens J. Inst. Electron. Information Commun. Eng. J77-C-1 390-7 (in Japanese)
5. Ura S, Suhara T, Nishihara H and Koyama J 1988 An integrated optic disk pickup device J. Lightwave Technol. 4 913-8
6. Hosokawa S, Kanai T, Kimura H and Nagayama A 1990 Robot automation of MDF jumpering operation J. Inst. Electron. Information Commun. Eng. J73-B-1 922-31 (in Japanese)
7. 2 gas J. Appl Phys. 66 2613-8
8. Shimada J, Ohguchi O and Sawada R 1992 Gradient-index microlens formed by ion-beam sputtering Appl. Opt. 31 5230-6