Response of oxygen plasma-treated thick film tin oxide sensor array for LPG, CCl4, CO and C3H7OH

Microelectronics Journal

Volumn 30, Issue 3, 1999, Pages 259-264

  Chaturvedi, A ^a   Mishra, V N ^a   Dwivedi, R ^a   Srivastava, S K ^a  

^a Ctr for Res in Microelectronics   (India)

Author keywords

Oxygen plasma; Thick film; Tin oxide

Indexed keywords

ANNEALING; CADMIUM; CARBON DIOXIDE; COPPER OXIDES; OXYGEN; PALLADIUM; PLATINUM; SEMICONDUCTING TIN COMPOUNDS; SEMICONDUCTOR DOPING; SEMICONDUCTOR PLASMAS; THICK FILM DEVICES; ZINC OXIDE;

THICK FILM GAS SENSORS;

CHEMICAL SENSORS;

EID: 0033095345     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0026-2692(98)00115-3     Document Type: Article

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