Structure-property relationships for nano-porous poly(methyl-silsesquioxane) films with low-dielectric constants prepared via organic/inorganic polymer hybrids

American Chemical Society, Polymer Preprints, Division of Polymer Chemistry

Volumn 40, Issue 1, 1999, Pages 398-399

  Nguyen, Cattien V ^a   Beyers, Robert B ^a   Hawker, Craig J ^a   Hedrick, James L ^a   Jaffe, Richard L ^a   Miller, Robert D ^a   Remenar, Julius F ^a   Rhee, Hee Woo ^a   Toney, Michael F ^a   Trollsas, Mikael ^a   Yoon, Do Y ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACRYLICS; ELECTRIC BREAKDOWN OF SOLIDS; HEATING; MOLECULAR STRUCTURE; MORPHOLOGY; NANOSTRUCTURED MATERIALS; PERMITTIVITY; POROUS MATERIALS; PYROLYSIS;

POLYCAPROLACTONES; POLYMETHYL SILSESQUIOXANES;

PLASTIC FILMS;

EID: 0033089534     PISSN: 00323934     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)