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Volumn 121, Issue 1, 1999, Pages 2-6

Contoured elastic-membrane microvalves for microfluidic network integration

Author keywords

[No Author keywords available]

Indexed keywords

ELASTOMERS; ETCHING; FLOW OF FLUIDS; FLUIDICS; LASER BEAM EFFECTS; POLYMERIC MEMBRANES;

EID: 0033082643     PISSN: 01480731     EISSN: 15288951     Source Type: Journal    
DOI: 10.1115/1.2798039     Document Type: Article
Times cited : (13)

References (13)
  • 1
    • 36449008900 scopus 로고
    • Stereo laser micromachining of silicon
    • Bloomstein, T. M., and Ehrlich, D, J„ 1992a, “Stereo laser micromachining of silicon,” Appi. Phys. Lett., Vol. 61, No. 6, p. 708.
    • (1992) Appi. Phys. Lett , vol.61 , Issue.6 , pp. 708
    • Bloomstein, T.M.1    Ehrlich, D.2
  • 2
    • 0001270330 scopus 로고
    • Laser-chemical three-dimensional writing for microelectromechanics and application to standard-cell microfluidics
    • Bloomstein, T. M., and Ehrlich, D. J., 1992b, “Laser-chemical three-dimensional writing for microelectromechanics and application to standard-cell microfluidics,” J. Vac. Sci. Technol B, Voi. 10, No. 6, p. 26-71.
    • (1992) J. Vac. Sci. Technol B , vol.10 , Issue.6 , pp. 26-71
    • Bloomstein, T.M.1    Ehrlich, D.J.2
  • 3
    • 0345730431 scopus 로고    scopus 로고
    • Sc.D. Thesis, Massachusetts Institute of Technology, Cambridge, MA
    • Bloomstein, T. M., 1996, “Laser microchemical etching of silicon,” Sc.D. Thesis, Massachusetts Institute of Technology, Cambridge, MA.
    • (1996) Laser Microchemical Etching of Silicon
    • Bloomstein, T.M.1
  • 8
    • 0029357345 scopus 로고
    • Polymer microstructures formed by moulding in capillaries
    • Kim, E., Xia, Y., and Whitesides, G.M., 1995, “Polymer microstructures formed by moulding in capillaries,” Nature, Voi. 376, p. 581.
    • (1995) Nature , vol.376 , pp. 581
    • Kim, E.1    Xia, Y.2    Whitesides, G.M.3
  • 11
    • 0028698702 scopus 로고
    • Microflow devices and systems
    • Shoji, S., and Esashi, I., 1994, “Microflow devices and systems,” J. Micromech. Microeng., Vol. 4, p. 157.
    • (1994) J. Micromech. Microeng , vol.4 , pp. 157
    • Shoji, S.1    Esashi, I.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.