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Volumn 20, Issue 1, 1999, Pages 74-83

Analysis of heat transfer in a chemical vapor deposition reactor: An eigenfunction expansion solution approach

Author keywords

Chemical vapor deposition; Collocation; Eigenfunction expansions; Weighted residual methods

Indexed keywords

CHEMICAL REACTORS; CHEMICAL VAPOR DEPOSITION; EIGENVALUES AND EIGENFUNCTIONS; ENTHALPY; HEAT FLUX; HEAT TRANSFER COEFFICIENTS; MATHEMATICAL MODELS; TEMPERATURE DISTRIBUTION;

EID: 0033080433     PISSN: 0142727X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0142-727X(98)10042-5     Document Type: Article
Times cited : (7)

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    • The onset of transverse recirculations during flow of gases in horizontal ducts with differentially heated lower walls
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  • 10
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    • Chemical vapor deposition processes
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    • Kleijn, C.R.1
  • 14
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    • New York
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  • 16
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    • Three-dimensional flow effects in silicon CVD in horizontal reactors
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.