MeV 4He++ channeling studies of epitaxially grown Pt films on Al2O3(0 0 0 1)

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 149, Issue 3, 1999, Pages 361-367

  Song, J H ^a   Choi, W K ^a   Kim, K H ^a   Lee, J C ^b   Kim, S C ^b   Kim, H B ^b   Lee, M H ^b   Jeong, K ^b   Whang, C N ^b  

^a Korea Institute of Science and Technology   (South Korea)

^b Yonsei University   (South Korea)

Author keywords

Channeling; Pt; RF magnetron sputtering; TEM; Twinning

Indexed keywords

BACKSCATTERING; CRYSTALLINE MATERIALS; FERROELECTRIC MATERIALS; INTERFACES (MATERIALS); MAGNETRON SPUTTERING; PLATINUM; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY; TWINNING;

CHANNELING;

EPITAXIAL GROWTH;

EID: 0033075501     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00933-1     Document Type: Article

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