Rapid thermal processing of lead zirconate titanate thin films on Pt-GaAs substrates based on a novel 1,1,1-tris(hydroxymethyl)ethane sol-gel route

Journal of Materials Research

Volumn 14, Issue 2, 1999, Pages 494-499

  Arscott, S ^a   Miles, R E ^a   Kennedy, J D ^a   Milne, S J ^a  

^a UNIVERSITY OF LEEDS   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; LEAD COMPOUNDS; PERMITTIVITY; PLATINUM; RAPID THERMAL ANNEALING; SEMICONDUCTING GALLIUM ARSENIDE; SOL-GELS; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

COERCIVE FIELD; LEAD ZIRCONATE TITANATE; REMANENT POLARIZATION;

DIELECTRIC FILMS;

EID: 0033075310     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1999.0070     Document Type: Article

References (26)

1. S. Arscott, Z. Awang, Y. L. Tu, S. J. Milne, and R. E. Miles, Ferroelectrics 187, 49 (1996).
2. Landolt-Börnstein New series: Ferroelectric and Antiferroelectric Substances, edited by K. H. Hellwege (Springer, Berlin, 1975), Vol. 9, p. 77.
3. K. M. Lakin and J. S. Wang, Appl. Phys. Lett. 38, 125 (1981).
4. S. V. Krishnaswamy, B. R. McAvoy and M. H. Francombe, Physics of Thin Films: Thin Films in Microwave Acoustics, edited by M. H. Francombe and J. L. Vossen (Academic Press, Boston, 1993), Vol. 17, p. 196.
5. Sol-Gel Science: The Physics and Chemistry of Sol-Gel Processing, edited by C. J. Brinker and G. W. Scherer (Academic Press, Boston, 1990).
6. M. J. Bozack, J. R. Williams, J. M. Ferraro, Z. C. Feng, and R. E. Jones, Jr., J. Electrochem. Soc. 142, 485 (1995).
7. G. Yi, Z. Wu, and M. Sayer, J. Appl. Phys. 64, 2713 (1988).
8. K. D. Budd, S. K. Dey, and D. A. Payne, Brit. Ceram. Proc. 36, 107 (1985).
9. N. J. Phillips, M. L. Calzada, and S. J. Milne, Brit. Pat. Appl. 9114476.6 (1991).
10. N. Sriprang, J. D. Kennedy, and S. J. Milne, J, Am. Ceram. Soc. (1997).
11. S. Arscott, R. Kurchania, R. E. Miles, and S. J. Milne, J. Mater. Sci. 32, 6129 (1997).
12. Y. L. Tu and S. J. Milne, J. Mater. Sci. 30, 2507 (1995).
13. G. A. C. M. Spierings, J. B. A. van Zon, M. Klee, and P. K. Larsen, Proc. 4th Int. Symp. on Integrated Ferroelectrics, Monterey, CA, March 9-11 (1992).
14. S. Hirano, T. Yugo, K. Kikuta, Y. Araki, M. Saitoh, and S. Ogasahara, J. Am. Ceram. Soc. 75, 2785 (1992).
15. S. Chen and I. Chen, IMF Proc., August (1993).
16. I. M. Reaney, K. G. Brooks, R. Klissurska, C. Pawlaczyk, and N. Setter, J. Am. Ceram. Soc. 77, 1209 (1994).
17. C. K. Kwok and S. B. Desu, Appl. Phys. Lett. 60, 1430 (1992).
18. K. G. Brooks, I. M. Reaney, R. Klissurska, Y. Huang, L. Bursill, and N. Setter, J. Mater. Res. 9, 2540 (1994).
19. Landolt-Bornstein New series: Semiconductors, edited by O. Madelung (Springer, New York, 1982), Vol. 17, p. 528.
20. Landolt-Bornstein New series: Semiconductors, edited by O. Madelung (Springer, New York, 1982), Vol. 17, p. 370.
21. B. A. Tuttle, J. A. Voigt, T. J. Garino, D. C. Gognow, R. W. Schwartz, D. L. Lamppa, T. J. Headly, and M. O. Eatough, Proc. 8th IEEE ISAF, 344-348 (1992).
22. J. Chen, K. R. Udayakumar, K. G. Brooks, and L. E. Cross, J. Appl. Phys. 71, 4465 (1992).
23. C. V. R. Vasant Kumar, R. Pascual, and M. Sayer, J. Appl. Phys. 71, 846 (1992).
24. T. Atsuki, N. Soyama, G. Sasaki, T. Yonezawa, K. Ogi, K. Sameshima, K. Hoshiba, Y. Nakao, and A. Kamisawa, Jpn. J. Appl. Phys. 33, 5196 (1994).
25. C. Kim, D. S. Yoon, J. S. Lee, C. G. Choi, and K. No, Jpn. J. Appl. Phys. 33, 2675 (1994).
26. C. D. E. Lakeman, Ph.D. Thesis, University of Illinois, Urbana, IL (1994).