Growth of GaN films using light radiation heating metal chemical vapor deposition

Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors

Volumn 20, Issue 2, 1999, Pages 147-151

  Zhou, Yugang ^a   Shen, Bo ^a   Chen, Zhizhong ^a   Chen, Peng ^a   Zhang, Rong ^a   Shi, Yi ^a   Zheng, Youdou ^a  

^a NANJING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EPITAXIAL GROWTH; METALLORGANIC CHEMICAL VAPOR DEPOSITION; NITRIDES;

GALLIUM NITRIDE FILM; LIGHT RADIATION HEATING;

SEMICONDUCTING GALLIUM COMPOUNDS;

EID: 0033069040     PISSN: 02534177     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (13)