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Volumn 10, Issue 5, 1999, Pages 362-366

Measurements of frictional characteristics of a pneumatic linear bearing

Author keywords

Air slide; Friction; Frictional force; Interferometer; Linear bearing; Pneumatic bearing

Indexed keywords

ACCELERATION; FORCE MEASUREMENT; FRICTION; GRAVITATIONAL EFFECTS; INTERFEROMETERS; PNEUMATIC EQUIPMENT;

EID: 0032966956     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/10/5/004     Document Type: Article
Times cited : (29)

References (7)
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    • 0027682319 scopus 로고
    • Applied measurements of multipurpose precise interferometer (AMOS-1)
    • Hosoe S and Yoshida T 1993 Applied measurements of multipurpose precise interferometer (AMOS-1) Nanotechnology 4 206-12
    • (1993) Nanotechnology , vol.4 , pp. 206-212
    • Hosoe, S.1    Yoshida, T.2
  • 3
    • 0038663868 scopus 로고
    • Development of laser beam writer
    • in Japanese
    • Onda H, Asahara A and Fujii S 1992 Development of laser beam writer JSPE 58 1837-42 (in Japanese)
    • (1992) JSPE , vol.58 , pp. 1837-1842
    • Onda, H.1    Asahara, A.2    Fujii, S.3
  • 4
    • 0037987470 scopus 로고
    • Optimal preview repetitive control for air slide linear motor
    • in Japanese
    • Egami T and Nishiyama T 1994 Optimal preview repetitive control for air slide linear motor Trans. Soc. Instrum. Control Engng. (Japan) 30 118-20 (in Japanese)
    • (1994) Trans. Soc. Instrum. Control Engng. (Japan) , vol.30 , pp. 118-120
    • Egami, T.1    Nishiyama, T.2
  • 5
    • 0023701685 scopus 로고
    • An active air bearing, ultra-precision control of the floating position and vibration
    • in Japanese
    • Watanabe I, Aoyama H and Shimokohbe A 1988 An active air bearing, ultra-precision control of the floating position and vibration JSPE 54 329-34 (in Japanese)
    • (1988) JSPE , vol.54 , pp. 329-334
    • Watanabe, I.1    Aoyama, H.2    Shimokohbe, A.3
  • 6
  • 7
    • 0032625977 scopus 로고    scopus 로고
    • A proposal for an impulse-response-evaluation method for force transducers
    • Fujii Y and Fujimoto H 1999 A proposal for an impulse-response-evaluation method for force transducers Meas. Sci. Technol. 10 31-3
    • (1999) Meas. Sci. Technol. , vol.10 , pp. 31-33
    • Fujii, Y.1    Fujimoto, H.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.