Vapor phase decomposition - Droplet collection: Can we improve the collection efficiency for copper contamination?

Solid State Phenomena

Volumn 65-66, Issue , 1999, Pages 93-96

  de Gendt, S ^a   Huber, A ^b   Onsia, B ^c   Arnauts, S ^a   Kenis, K ^a   Knotter, D M ^d   Mertens, P W ^a   Heyns, M M ^a  

^a IMEC   (Belgium)

^b GeMeTec   (Germany)

^c De Naeyer Instituut   (Belgium)

^d PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

Copper; Preconcentration; Vapor Phase Decomposition Droplet Collection (VPD DC)

Indexed keywords

COPPER; EFFICIENCY; MIXTURES; SILICON WAFERS; VAPOR PHASE EPITAXY; CONTAMINATION; DECOMPOSITION;

COLLECTION EFFICIENCY; COPPER CONTAMINATION; DRIVING FORCES; PRE-CONCENTRATION; VAPOR PHASE DECOMPOSITION-DROPLET COLLECTIONS; WAFER SURFACE;

DROPS; SILICON WAFERS;

COLLECTION EFFICIENCY (CE); VAPOR PHASE DECOMPOSITION-DROPLET COLLECTION (VPD-DC);

EID: 0032803106     PISSN: 10120394     EISSN: 16629779     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/SSP.65-66.93     Document Type: Conference Paper

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