A kinetic model for tris(dimethylamino) arsine decomposition on gaas(100) surfaces

Journal of Electronic Materials

Volumn 28, Issue 1, 1999, Pages 43-49

  Shi, B Q ^a   Tu, C W ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Gaas epitaxy; Kinetic modeling; Pyrolytic decomposition; Surface desorption; Tris(dimethylamino)arsine

Indexed keywords

ARSENIC COMPOUNDS; COMPUTER SIMULATION; EPITAXIAL GROWTH; MATHEMATICAL MODELS; PYROLYSIS; TEMPERATURE PROGRAMMED DESORPTION; VACUUM TECHNOLOGY;

KINETIC MODELS; TRISDIMETHYLAMINO ARSINE;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 0032793899     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-999-0193-9     Document Type: Article

References (23)

1. K. Hamaoka, I. Suemune, K. Fujii, T. Koui, A. Kishimoto and M. Yamanishi, Jpn. J. Appl. Phys. 30, L1579 (1991).
2. C.R. Abernathy, P.W. Wisk, S.J. Pearton, F. Ren, D.A. Bohling and G.T. Muhr, J. Cryst. Growth 124, 64 (1992).
3. C.R. Abernathy, P.W. Wisk, D.A. Bohling and G.T. Muhr, Appl. Phys. Lett. 60, 2421 (1992).
4. K. Fujii and I. Suemune, Appl. Phys. Lett. 60, 1498 (1992).
5. K. Fujii and I. Suemune, Appl. Phys. Lett. 61, 2577 (1992).
6. K. Fujii and I. Suemune, Appl. Phys. Lett. 62, 1420 (1993).
7. H.K. Dong, N.Y. Li and C.W. Tu, J. Electron. Mater. 24, 69 (1995).
8. N.Y. Li, H.K. Dong, W.S. Wong and C.W. Tu, J. Cryst. Growth 164, 112 (1996).
9. C.W. Tu, H.K. Dong and N.Y. Li, Mater. Chem. and Phys. 40, 260 (1995).
10. H.K. Dong, Ph. D. Thesis, University of California, San Diego, La Jolla, CA, (1995).
11. T. Koui, I. Suemune, K. Miyakoshi, K. Fujii and M. Yamanishi, Jpn, J. Appl. Phys. 31, L1272 (1992).
12. T. Koui, et al. Ext. Abs. 1991 Intl. Conf. on Solid State Devices and Materials, Yokohama, Japan, (1991).
13. S. Salim, J.P. Lu and K.F. Jensen, J. Cryst. Growth 124, 16 (1992).
14. M. Xi, S. Salim, K.F. Jensen and D.A. Bohling, Mater. Res. Soc. Symp. Proc. 334, (Pittsburgh, PA: Mater. Res. Soe., 1994), p. 169.
15. M. Xi and K.F. Jensen, Surf. Sci. 339, 310 (1995).
16. T.J. Whitaker, T. Martin, A.D. Johnson, A.J. Pidduck and J.P. Newey, J. Cryst. Growth 164, 125 (1996).
17. V.M. Donnelly and A. Robertson, Jr., Surf. Sci. 293, 93 (1993).
18. C.A. Larsen, N.I. Buchan, S.H. Li and G.B. Stringfellow, J. Cryst. Growth 94, 663 (1989).
19. M.G. Jacko and S.W. Price, Can. J. Chem. 41, 1560 (1963).
20. C.W. Gear, Numerical Initial Value Problems in Ordinary Differential Equations, (Englewood Cliffs, NJ: Prentice-Hall, 1971).
21. J.S. Foord, C.L. French, C.L. Levoguer and G.J. Davies, Phil. Trans. R. Soc. Lond. A 344, 507 (1993).
22. S.R. Heller and G.W. Milne, EPA/NIH Mass Spectral Data Base.
23. S. Salim and K.F. Jensen, Chem. of Mater. 7, 507 (1995).