AlInP benchmarks for growth of AlGaInP compounds by organometallic vapor-phase epitaxy

Journal of Crystal Growth

Volumn 196, Issue 1, 1999, Pages 13-22

  Bertness, K A ^a,b   Kurtz, Sarah R ^a   Asher, S E ^a   Reedy Jr , R C ^a  

^a NATIONAL RENEWABLE ENERGY LABORATORY   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

AlGaInP; Indium compounds; Organometallic vapor phase epitaxy (OMVPE); Oxygen impurity; Photocurrent; Secondary ion mass spectrometry (SIMS)

Indexed keywords

COMPOSITION EFFECTS; CRYSTAL IMPURITIES; METALLORGANIC VAPOR PHASE EPITAXY; ORGANOMETALLICS; PHOTOCURRENTS; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTING SELENIUM; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING; SEMICONDUCTOR GROWTH; SOLAR CELLS; ZINC;

ALUMINUM GALLIUM INDIUM PHOSPHIDE;

SEMICONDUCTING ALUMINUM COMPOUNDS;

EID: 0032784884     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(98)00751-9     Document Type: Article

References (35)

1. K.A. Bertness, C. Kramer, J.M. Olson, J. Moreland, J. Electron. Mater. 23 (1994) 197.
2. S.R. Kurtz, J.M. Olson, in: Proc. 19th IEEE Photovoltaic Specialists Conf., vol. 19, IEEE, New York, 1987, p. 823.
3. R.G. Wilson, F.A. Stevie, C.W. Magee, Secondary Ion Mass Spectrometry: a Practical Handbook for Depth Profiling and Bulk Impurity Analysis, Wiley, New York, 1987.
4. M. Umemura, K. Kuwahara, S. Fuke, M. Sato, T. Imai, J. Appl. Phys. 72 (1992) 313.
5. S. Nayak, J.W. Huang, J.M. Redwing, D.E. Savage, M.G. Lagally, T.F. Kuech, Appl. Phys. Lett. 68 (1995) 1270.
6. H. Terao, H. Sunakawa, J. Crystal Growth 68 (1984) 157.
7. X.X. Liu, J.R. Sites, J. Appl. Phys. 75 (1994) 577.
8. J.C. Chen, Z.C. Huang, K.J. Lee, R. Kanjolia, J. Electron. Mater. 26 (1997) 361.
9. M. Kondo, N. Okada, K. Domen, K. Sugiura, C. Anayama, T. Tanahashi, J. Electron. Mater. 23 (1994) 355.
10. M. Suzuki, K. Itaya, Y. Nishikawa, H. Sugawara, M. Okajima, J. Crystal Growth 133 (1993) 303.
11. Y. Nishikawa, M. Suzuki, M. Ishikawa, Y. Kokubun, G.-C. Hatakoshi, J. Crystal Growth 123 (1992) 181.
12. M.J. Hafich, L.M. Woods, H.S. Kim, G.A. Patrizi, G.Y. Robinson, J. Crystal Growth 127 (1993) 995.
13. S.M. Sze, Physics of Semiconductor Devices, 2nd ed., Wiley, New York, 1981, p. 24.
14. C. Nozaki, Y. Ohba, J. Appl. Phys. 66 (1989) 5394.
15. M. Ishikawa, M. Suzuki, Y. Nishikawa, K. Itaya, G. Hatakoshi, Y. Kokubun, Y. Uematsu, Inst. Phys. Conf. Ser. No. 106, vol. 106, IOP Publishing Ltd., London, 1990, p. 575.
16. S. Minagawa, M. Kondow, H. Yanagisawa, T. Tanaka, J. Crystal Growth 118 (1992) 425.
17. S.R. Kurtz, J.M. Olson, K.A. Bertness, K. Sinha, B. McMahon, S. Asher, Conf. Rec. 25th IEEE Photovoltaic Specialists Conf, IEEE, New York, 1996, p. 37.
18. S. Ben Amor, L.D. Mowski, J.C. Portal, N.J. Pulsford, R.J. Nicholos, J. Singleton, M. Razeghi, J. Appl. Phys. 65 (1989) 2756.
19. M.O. Wantanabe, Y. Ohba, J. Appl. Phys. 60 (1986) 1032.
20. S. Nojima, H. Tanaka, H. Asahi, J. Appl. Phys. 59 (1986) 3489.
21. J.S. McCalmont, H.C. Casey, T.Y. Wang, G.B. Stringfellow, J. Appl. Phys. 71 (1992) 1046.
22. M. Suzuki, Y. Nishikawa, M. Ishikawa, Y. Kokubun, J. Crystal Growth 113 (1991) 127.
23. K.A. Bertness, S.R. Kurtz, D.J. Friedman, A.E. Kibbler, C. Kramer, J.M. Olson, Appl. Phys. Lett. 65 (1994) 989.
24. K.A. Bertness, S.R. Kurtz, D.J. Friedman, A.E. Kibbler, C. Kramer, J.M. Olson, Conf. Rec. 1st World Conf. on Photovoltaic Engery Conversion, Ed., IEEE, New York, 1995, p. 1671.
25. D.J. Friedman, S.R. Kurtz, K.A. Bertness, A.E. Kibbler, C. Kramer, J.M. Olson, D.L. King, B.R. Hansen, J.K. Snyder, Progress in Photovoltaics 3 (1995) 47.
26. Y. Nishikawa, M. Suzuki, M. Okajima, Jpn. J. Appl. Phys. 32 (1993) 498.
27. T.F. Kuech, E. Veuhoff, T.S. Kaun, V. Deline, R. Potemski, J. Crystal Growth 77 (1986) 252.
28. C.R. Abernathy, A.S. Jordan, S.J. Pearton, W.S. Hobson, D.A. Bohling, G.T. Muhr, Appl. Phys. Lett. 56 (1990) 2654.
29. F.W. Reier, E. Jahn, N. Agrawal, P. Harde, N. Grote, J. Crystal Growth 135 (1994) 463.
30. J.S. Roberts, C.C. Button, A. Chew, J. Crystal Growth 135 (1994) 365.
31. J.M. Olson, S.R. Kurtz, A.E. Kibbler, J. Crystal Growth 89 (1988) 131.
32. D.J. Friedman, S.R. Kurtz, A.E. Kibbler, J.M. Olson, Conf. Rec. 22nd IEEE Photovoltaic Specialists Conf., Ed., IEEE, New York, 1991, p. 358.
33. T. Takamoto, E. Ikeda, H. Kurita, M. Ohmori, Appl. Phys. Lett. 70 (1997) 381.
34. C.H. Henry, D.V. Lang, Phys. Rev. B 15 (1977) 989.
35. D.E. Aspnes, Surf. Sci. 132 (1983) 406.