Relaxation of misfit-induced strain in semiconductor heterostructures

Physica Status Solidi (A) Applied Research

Volumn 171, Issue 1, 1999, Pages 215-225

  Strunk, H P ^a   Albrecht, M ^a   Christiansen, S ^a   Dorsch, W ^a   Hormann U ^a   Jahnen, B ^a,b   Remmele, T ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

^b FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; CRYSTAL SYMMETRY; LIQUID PHASE EPITAXY; PIEZOELECTRICITY; POLARIZATION; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR GROWTH; SILICON WAFERS; SOLID SOLUTIONS; STRESS RELAXATION; TRANSMISSION ELECTRON MICROSCOPY;

POLYMORPHISM;

HETEROJUNCTIONS;

EID: 0032758760     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1521-396X(199901)171:1<215::AID-PSSA215>3.0.CO;2-9     Document Type: Article

References (39)

1. R.J. ASARO and W.A. TILLER, Metallurg. Trans. 3, 1789 (1972).
2. M.A. GRINFELD, Soviet Phys. - Dokl. 31, 831 (1986).
3. D. SROLOVITZ, Acta Metall. 37, 621 (1989).
4. D.J. EAGLESHAM and M. CERULLO, Phys. Rev. Lett. 64, 1943 (1990).
5. A.G. CULLIS, D.J. ROBBINS, A.J. PIDDUCK, and P.W. SMITH, Microscopy of Semiconducting Materials, Eds. A.G. CULLIS and M.J. LONG, Institute of Physics Conf. Ser. No. 117, Bristol 1991 (p. 439).
6. S. CHRISTIANSEN, The interaction square in heteroepitaxial growth: strain-topology-defects-composition, Series 'Mikrostrukturelle Materialforschung', Vol. 4, Ed. H.P. STRUNK, Lehrstuhl für Mikrocharakterisierung, Universität Erlangen (1997).
7. P.O. HANSSON, J.H. WERNER, L. TAPFER, L. TILLY, and E. BAUSER, J. Appl. Phys. 68, 2158 (1990).
8. B. JAHNEN, M. ALBRECHT, W. DORSCH, S. CHRISTIANSEN, H.P. STRUNK, D. HANSER, and R.F. DAVIS, MRS Internet J. Nitride Semicond. Res. 3, Art. 39 (1998).
9. H. ANGERER, D. BRUNNER, F. FREUDENBERG, O. AMBACHER, M. STUTZMANN, R. HÖPLER, T. METZGER, E. BORN, G. DOLLINGER, A. BERGMAIER, S. KARSCH, and H.-J. KÖRNER, Appl. Phys. Lett. 71, 1504 (1997).
10. M. ALBRECHT, S. CHRISTIANSEN, J. MICHLER, W. DORSCH, H.P. STRUNK, P.O. HANSSON, and E. BAUSER, Appl. Phys. Lett. 67, 1232 (1995).
11. W.W. MULLINS, J. Appl. Phys. 30, 77 (1959).
12. B.C. ORR, D. KESSLER, C.W. SNYDER, and L. SANDER, Europhys. Lett. 19, 33 (1992).
13. W. DORSCH, Die Topologie fehlpassender SiGe-Schichten: Merkmale selbstorganisierten Wachstums, Series 'Mikrostrukturelle Materialforschung', Vol. 7, Ed. H.P. STRUNK, Lehrstuhl für Mikrocharakterisierung, Universität Erlangen (1998).
14. F.C. FRANK and J.H. VAN DER MERWE, Proc. Roy. Soc. London A 198, 205 (1949).
15. J.H. VAN DER MERWE, J. Appl. Phys. 34, 117 (1963).
16. J.W. MATTHEWS and A.E. BLAKESLEE, J. Cryst. Growth 27, 118 (1974).
17. J.W. MATTHEWS, in: Epitaxial Growth, Part B, Ed. J.W. MATTHEWS, Academic Press, New York 1979.
18. A.G. CULLIS, A.J. PIDDUCK, and M.T. EMENY, Phys. Rev. Lett. 75, 2368 (1995).
19. A.M. ROCHER, Solid State Phenomena 19/20, 563 (1991).
20. F.K. LEGOUES, M. HORN-VON HOEGEN, M. COPEL, and R.M. TROMP, Phys. Rev. B 44, 12849 (1991).
21. M. ALBRECHT, H.P. STRUNK, P.O. HANSSON, and E. BAUSER, J. Cryst. Growth 128, 327 (1993).
22. M. ALBRECHT, S. CHRISTIANSEN, P.O. HANSSON, H.P. STRUNK, and E. BAUSER, Solid State Phenomena 37/38, 41 (1994).
23. H.P. STRUNK, in: Electron microscopy of boundaries and interfaces in materials science, Eds. J. HEYDENREICH and W. NEUMANN, The International Centre of Electron Microscopy at the Max-Planck-Institute of Microstructure Physics, Halle/Saale, Germany, Halle 1994 (p. 126).
24. M. ALBRECHT, S. CHRISTIANSEN, H.P. STRUNK, P.O. HANSSON, and E. BAUSER, Solid State Phenomena 32/33, 433 (1993).
25. M. ALBRECHT, D. STENKAMP, H.P. STRUNK, W. JÄGER, P.O. HANSSON, and E. BAUSER, Inst. Phys. Conf. Ser. 114, 77(1993).
26. S.S. IYER and F.K. LEGOUES, J. Appl. Phys. 65, 4693 (1989).
27. B. HOLLÄNDER, R. BUTZ, and S. MANTL, Phys. Rev. B 46, 6975 (1992).
28. J.M. BARIBEAU, J. Appl. Phys. 74, 3805 (1993).
29. K. DETTMER, W. FREIMANN, M. LEVY, YU.L. KHAIT, and R. BESERMANN, Appl. Phys. Lett. 66, 2376 (1995).
30. A. ROSENAUER, Doctoral Thesis, University of Regensburg, 1996.
31. P. FAHEY, S.S. IYER, and G.J. SCILLA, Appl. Phys. Lett. 54, 843 (1989).
32. M. ALBRECHT, S. CHRISTIANSEN, and H.P. STRUNK, Appl. Phys. Lett. 70, 952 (1997).
33. Z. LILIENTAL-WEBER, Y. CHEN, S. RUVIMOV, W. SWIDER, and J. WASHBURN, Mater. Res. Soc. Symp. Proc. 449, 417 (1997).
34. Z. LILIENTAL-WEBER, Y. CHEN, S. RUVIMOV, and J. WASHBURN, Phys. Rev. Lett. 79, 2835 (1997).
35. S. CHRISTIANSEN, M. ALBRECHT, H.P. STRUNK, P.O. HANSSON, and E. BAUSER, Appl. Phys. Lett. 66, 574 (1995).
36. B. JAHNEN, Diploma Thesis, University of Erlangen, 1998.
37. C.G. VAN DE WALLE, Phys. Rev. B 56, R10020 (1997).
38. C. STAMPFL and C.G. VAN DE WALLE, Phys. Rev. B 57, R15052 (1998).
39. F. BERNARDINI, V. FIORENTINI, and D. VANDERBILT, Phys. Rev. B 56, R10024 (1997).