Native oxides on AlGaAs epilayer

Thin Solid Films

Volumn 338, Issue 1-2, 1999, Pages 46-48

  Ghita, R V ^a   Vasile, E ^b   Cengher, D ^a  

^a NATIONAL INSTITUTE OF MATERIALS PHYSICS   (Romania)

^b Metav SA Bucuresti   (Romania)

Author keywords

Electron microscopy; Gallium arsenide; Heat treatment; Oxidation

Indexed keywords

DIELECTRIC PROPERTIES OF SOLIDS; ELECTRON SPECTROSCOPY; FILM GROWTH; HEAT TREATMENT; OXIDATION; OXIDES; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING GALLIUM ARSENIDE;

ELECTRON DISPERSION SPECTROSCOPY;

DIELECTRIC FILMS;

EID: 0032734305     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)00973-0     Document Type: Article

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