Kinetics of surface droplet epitaxy and its application to fabrication of mushroom-shaped metal/Si heterostructure on nanometer scale

Surface Science

Volumn 420, Issue 2-3, 1999, Pages 190-199

  Wakayama, Yutaka ^a   Tanaka, Shun Ichiro ^a  

^a JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

Gold; Liquid phase epitaxy; Metal semiconductor interface; Silicon; Silver; Solid liquid interface; Surface diffusion

Indexed keywords

ANNEALING; GOLD; INTERDIFFUSION (SOLIDS); LIQUID PHASE EPITAXY; MORPHOLOGY; NANOSTRUCTURED MATERIALS; PHASE INTERFACES; REACTION KINETICS; SEMICONDUCTING SILICON; SEMICONDUCTOR METAL BOUNDARIES; SILVER; SURFACE PHENOMENA;

SURFACE DROPLET EPITAXY;

HETEROJUNCTIONS;

EID: 0032715534     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(98)00824-3     Document Type: Article

References (20)

1. Hiraki A. J. Electrochem. Soc. 27:1980;2662.
2. le Lay G. Surf. Sci. 132:1983;169.
3. Chang P.H., Berman G., Shen C.C. J. Appl. Phys. 63:1988;1473.
4. Cros A., Muret P. Mater. Sci. Rep. 8:1992;271.
5. Ishizaka A., Shiraki Y. J. Electrochem. Soc. 33:1986;666.
6. Wakayama Y., Tanaka S. J. Cryst. Growth. 181:1997;304.
7. Wakayama Y., Fujinuma H., Tanaka S. J. Mater. Res. 13:1998;1492.
8. Brillson L.J., Katnani A.D., Kelly M., Margaritondo G. J. Vac. Sci. Technol. A. 2:1984;551.
9. Lu Z.H., Sham T.K., Norton P.R. Appl. Phys. Lett. 57:1990;37.
10. Carriere B., Deville J.P., El Maachi A. Surf. Sci. 168:1986;149.
11. Chen C.R., Chen L.J. J. Appl. Phys. 78:1995;919.
12. Sakai A., Ono H., Ishida K., Niino T., Tatsumi T. Jpn. J. Appl. Phys. 30:1991;L941.
13. Hansen M., Anderko K. Contribution of Binary Alloys. 1991;Genium, New York.
14. Ottaviani G., Sigurd D., Marrello V., McCaldin J.O., Mayer J.W. Science. 180:1973;948.
15. Sankur H., McCaldin J.O., Devaney J. Appl. Phys. Lett. 22:1973;64.
16. Davey J.E., Christou A., Day H.M. Appl. Phys. Lett. 28:1976;365.
17. Wagner R.S., Ellis W.C. Appl. Phys. Lett. 4:1964;89.
18. Sinniah K., Sherman M.G., Lewis L.B., Weinberg W.H., Yates J.T. Jr., Janda K.C. J. Chem. Phys. 92:1990;5700.
19. LeGoues F.K., Liehr M., Renier M., Krakow W. Philos. Mag. B. 57:1988;179.
20. Shirokoff J., Erb U. Philos. Mag. Lett. 58:1988;255.