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Volumn 3606, Issue , 1999, Pages 10-19
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Bio/chemical microsystems with integrated photodiode arrays of improved sensitivity and functionality
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Author keywords
[No Author keywords available]
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Indexed keywords
INTEGRATED CIRCUIT LAYOUT;
INTEGRATED OPTICS;
MACHINING;
MICROELECTRONIC PROCESSING;
OPTICAL SYSTEMS;
OPTICAL WAVEGUIDES;
PHOTODIODES;
SEMICONDUCTING GLASS;
SEMICONDUCTING SILICON;
SENSITIVITY ANALYSIS;
BIOCHEMICAL MICROSYSTEMS;
GLASS OPTICAL WAVEGUIDES;
INTEGRATED PHOTODIODE ARRAYS;
SILICON MICROMACHINING;
ELECTRONIC MEDICAL EQUIPMENT;
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EID: 0032691327
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Article |
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Times cited : (7)
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References (7)
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