Controlled silicon thinning for design debug of C4 packaged ICs

Annual Proceedings - Reliability Physics (Symposium)

Volumn , Issue , 1999, Pages 327-332

  Goruganthu, Rama R ^a   Bruce, Mike ^a   Birdsley, Jeff ^a   Bruce, Victoria ^a   Gilfeather, Glen ^a   Ring, Rose ^a   Antoniou, Nicholas ^a   Salen, Jesse ^a   Thompson, Mark ^a  

^a ADVANCED MICRO DEVICES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; COMPUTER AIDED DESIGN; ETCHING; FAILURE ANALYSIS; ION BEAMS; LASER BEAM EFFECTS; MICROSCOPIC EXAMINATION; SEMICONDUCTING SILICON; SUBSTRATES; SURFACE ROUGHNESS; THICKNESS MEASUREMENT;

CONTROLLED SILICON THINNING; DESIGN DEBUG; ENDPOINT DETECTION; FOCUSED ION BEAM TOOL; INFRARED MICROSCOPY; LASER CHEMICAL ETCHER; OPTICAL BEAM INDUCED CURRENT; TRENCH PLANARITY;

FLIP CHIP DEVICES;

EID: 0032691221     PISSN: 00999512     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (5)