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Volumn 4, Issue , 1999, Pages 2729-2735
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Two-dimensional fine particle positioning using a piezoresistive cantilever as a micro/nano-manipulator
a
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPUTER SIMULATION;
FEEDBACK CONTROL;
MANIPULATORS;
MICROSCOPES;
MOTION CONTROL;
PARTICLES (PARTICULATE MATTER);
POSITION CONTROL;
REAL TIME SYSTEMS;
USER INTERFACES;
FINE PARTICLE POSITIONING;
INTERACTION FORCES;
MICRO MANIPULATORS;
NANOMANIPULATORS;
PARTICLE MANIPULATION;
PIEZORESISTIVE CANTILEVER;
SURFACE ALIGNMENT SENSING;
ROBOTIC ASSEMBLY;
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EID: 0032691003
PISSN: 10504729
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Article |
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Times cited : (25)
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References (14)
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