Strategy and tools for yield enhancement

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3743, Issue , 1999, Pages 122-129

  Recio, Miguel ^a  

^a Lucent Technologies Microelectronica   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

DATA PROCESSING; FAILURE ANALYSIS; OPTIMIZATION; QUALITY CONTROL; RELIABILITY; YIELD STRESS;

YIELD ANALYSIS TOOLS; YIELD COMMUNICATION; YIELD METRICS; YIELD PRIORITISATION;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0032690922     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.346905     Document Type: Conference Paper

References (8)