Nanoscale etching and indentation of a silicon(001) surface with carbon nanotube tips

Nanotechnology

Volumn 10, Issue 3, 1999, Pages 253-257

  Dzegilenko, Fedor N ^a   Srivastava, Deepak ^a   Saini, Subhash ^a  

^a NASA AMES RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CHEMICAL BONDS; ETCHING; MOLECULAR DYNAMICS; NANOTUBES; SEMICONDUCTING GERMANIUM; SILICON WAFERS;

NANOINDENTATION; NANOSCALE ETCHING;

NANOTECHNOLOGY;

EID: 0032690657     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/10/3/305     Document Type: Article

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