Laser Fizeau interferometer for silicon wafer site flatness testing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3619, Issue , 1999, Pages 101-109

  Novak, Erik ^a   Olszak, Artur ^a   Stumpe, Ken ^a   Knowlden, Bob ^a   Malevanchik, Leonid ^a   Angeli, George ^a  

^a Veeco Metrology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFEROMETERS; LASER DIAGNOSTICS; SURFACE MEASUREMENT;

FLATNESS MEASUREMENT; LASER FIZEAU INTERFEROMETER; OPTICAL METROLOGY;

SILICON WAFERS;

EID: 0032690334     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (4)