Measurement of V T and L eff using MOSFET gate-substrate capacitance

IEEE International Conference on Microelectronic Test Structures

Volumn , Issue , 1999, Pages 152-155

  Lau, M M ^a   Chiang, C Y T ^a   Yeow, Y T ^a   Yao, Z Q ^a  

^a UNIVERSITY OF QUEENSLAND   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

GATE-SUBSTRATE CAPACITANCE;

CAPACITANCE MEASUREMENT; ELECTRIC CURRENT MEASUREMENT; ELECTRIC RESISTANCE; GATES (TRANSISTOR); VOLTAGE MEASUREMENT;

MOSFET DEVICES;

EID: 0032689590     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (7)