Fabrication and testing of surface micromachined silicon carbide micromotors

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 644-649

  Yasseen, A Azzam ^a   Wu, Chien Hung ^a   Zorman, Christian A ^a   Mehregany, Mehran ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTRIC MOTORS; ELECTRIC POTENTIAL; EQUIPMENT TESTING; FABRICATION; GEARS; MICROMACHINING; MOLDING; MULTILAYERS; POLYCRYSTALLINE MATERIALS; SILICON CARBIDE;

MICROMOTORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032688948     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.1999.746903     Document Type: Conference Paper

References (10)