Theory of adsorption and diffusion of Si adatoms on H/Si(1 0 0) stepped surface

Journal of Crystal Growth

Volumn 201, Issue , 1999, Pages 77-80

  Nara, Jun ^a   Sasaki, Taizo ^a   Ohno, Takahisa ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL METHODS; CRYSTAL ATOMIC STRUCTURE; CRYSTAL ORIENTATION; DIFFUSION IN SOLIDS; GAS ADSORPTION; HYDROGEN; SILICON WAFERS; SURFACE ROUGHNESS;

ADATOMS; FIRST-PRINCIPLES METHOD; STEP DIFFUSION;

SEMICONDUCTING SILICON;

EID: 0032688621     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(98)01289-5     Document Type: Article

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