Bottom anti-reflective coatings for ArF, KrF, and i-line applications: A comparison of theory, design, and lithographic aspects

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3678, Issue I, 1999, Pages 550-561

  Padmanaban, Munirathna ^a   Ding, Shuji ^a   Ficner, Stanley A ^a   Kang, Wen Bin ^a   Khanna, Dinesh N ^a   Dammel, Ralph R ^a  

^a CLARIANT CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIREFLECTION COATINGS; AROMATIC COMPOUNDS; BENZENE; DYES; FLUORINE COMPOUNDS; PHENOLS; ULTRAVIOLET RADIATION;

BOTTOM ANTIREFLECTIVE COATINGS (BARC);

PHOTORESISTS;

EID: 0032687190     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.350238     Document Type: Conference Paper

References (8)