New method of determination of the photoresist Dill parameters using spectroscopic ellipsometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3678, Issue I, 1999, Pages 126-137

  Boher, Pierre ^a   Defranoux, Christophe ^a   Piel, Jean Philippe ^a   Stehle, Jean Louis ^a  

^a SOPRA   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRY; OPACITY; REFRACTIVE INDEX;

DILL PARAMETERS; SPECTROSCOPIC ELLIPSOMETRY (SE);

PHOTORESISTS;

EID: 0032687177     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (10)