Data processing in force curve mapping

Applied Surface Science

Volumn 144-145, Issue , 1999, Pages 613-617

  Sugisaki, Katsumi ^a,b   Nakagiri, Nobuyuki ^a  

^a NIKON CORPORATION   (Japan)

^b Group 3   (Japan)

Author keywords

Adhesion force; Elasticity; Force curve; Topographic height

Indexed keywords

ADHESION; ELASTICITY; SILICON NITRIDE; SURFACE PROPERTIES; SURFACE TOPOGRAPHY;

FORCE CURVE MAPPING; TOPOGRAPHIC HEIGHT;

ATOMIC FORCE MICROSCOPY;

EID: 0032686804     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(98)00876-9     Document Type: Article

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