Neural network modeling of PECVD silicon nitride films

Materials Science in Semiconductor Processing

Volumn 2, Issue 1, 1999, Pages 1-11

  Ghosh, S ^a   Dutta, P K ^a   Bose, D N ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY   (India)

Author keywords

[No Author keywords available]

Indexed keywords

NEURAL NETWORKS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REFRACTIVE INDEX; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DEVICE MODELS; SILICON NITRIDE;

SILICON NITRIDE FILMS;

SEMICONDUCTING FILMS;

EID: 0032686626     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1369-8001(98)00023-7     Document Type: Article

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