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Volumn 507, Issue , 1999, Pages 679-684
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Concentration dependence of hydrogen diffusion in hydrogenated silicon
a
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS FILMS;
AMORPHOUS SILICON;
BAND STRUCTURE;
COMPOSITION EFFECTS;
CRYSTAL MICROSTRUCTURE;
CRYSTALLINE MATERIALS;
ELECTRON TRAPS;
HYDROGEN;
HYDROGENATION;
ION IMPLANTATION;
MATHEMATICAL MODELS;
SILICON WAFERS;
ENERGY BAND MODEL;
TRAPPING MODEL;
DIFFUSION IN SOLIDS;
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EID: 0032686541
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (2)
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References (15)
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