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Volumn 7, Issue 7, 1999, Pages 891-902

Real-time monitoring for a process with multiple operating modes

Author keywords

Classification; Fault detection; Monitoring; Multilevel systems; Multivariate quality control

Indexed keywords

HIERARCHICAL SYSTEMS; MATHEMATICAL MODELS; MULTIVARIABLE CONTROL SYSTEMS; QUALITY CONTROL;

EID: 0032686509     PISSN: 09670661     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0967-0661(99)00038-6     Document Type: Article
Times cited : (173)

References (13)
  • 1
    • 0020843611 scopus 로고
    • Reconciliation of process flow rates by matrix projection
    • Crowe C.M., Campos Y.A.G., Hrymak A. Reconciliation of process flow rates by matrix projection. AIChE Journal. 29:1983;881-888.
    • (1983) AIChE Journal , vol.29 , pp. 881-888
    • Crowe, C.M.1    Campos, Y.A.G.2    Hrymak, A.3
  • 3
    • 0001863578 scopus 로고    scopus 로고
    • Development and benchmarking of multivariate statistical process control tools for a semiconductor etch process: Improving robustness through model update
    • Banff, Canada
    • Gallagher, B. N., Wise, B. M., Butler, S. W., White, S. W., & Barna, G. G. (1997). Development and benchmarking of multivariate statistical process control tools for a semiconductor etch process: Improving robustness through model update. Proceedings of IFAC workshop on Adchem '97, Banff, Canada (pp. 78-83).
    • (1997) Proceedings of IFAC Workshop on Adchem '97 , pp. 78-83
    • Gallagher, B.N.1    Wise, B.M.2    Butler, S.W.3    White, S.W.4    Barna, G.G.5
  • 4
    • 0039351493 scopus 로고    scopus 로고
    • Process operation improvement based on statistical data analysis
    • to be submitted
    • Hwang, D., Ahn, T. J., & Han, C. (1999). Process operation improvement based on statistical data analysis. AIChE Journal, to be submitted.
    • (1999) AIChE Journal
    • Hwang, D.1    Ahn, T.J.2    Han, C.3
  • 9
    • 0028483476 scopus 로고
    • Monitoring batch processes using multiway principal component analysis
    • Nomikos P., MacGregor J.F. Monitoring batch processes using multiway principal component analysis. AIChE Journal. 40:1994;1361-1375.
    • (1994) AIChE Journal , vol.40 , pp. 1361-1375
    • Nomikos, P.1    MacGregor, J.F.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.