An estimation of optimum Ar ion bombardment energy for good Fe films applying thermal spike effect

Thin Solid Films

Volumn 343-344, Issue 1-2, 1999, Pages 71-74

  Iwatsubo, S ^a   Takahashi, T ^b   Naoe, M ^c  

^a TOYAMA INDUSTRIAL TECHNOLOGY CENTER   (Japan)

^b UNIVERSITY OF TOYAMA   (Japan)

^c TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Fe films; Ion bombardment; Thermal spike effect

Indexed keywords

ARGON; ENERGY TRANSFER; FILM PREPARATION; ION BEAMS; ION BOMBARDMENT; IRON; KINETIC ENERGY; MAGNETIC FILMS; SPUTTER DEPOSITION;

THERMAL SPIKE EFFECT;

METALLIC FILMS;

EID: 0032686160     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01577-6     Document Type: Article

References (7)

1. Fukizawa A, , N. Naoe, IEEE Trans. Magn. 24 (6) (1988) 3078.
2. M. Naoe, Y. Yamaga, N. Terada, IEEE Trans. Magn. MAG-21 (1985) 1900.
3. N. Ishiwata, C. Wakabayashi, T. Matsumoto, IEEE Trans. Magn. MAG-23 (1987) 2152.
4. H.S. Carslow, J.C. Jaeger, Conduction of Heat in Solids, 2nd ed., Oxford University Press, London, 1959, p. 357.
5. C. Carter, D.G. Armour, S.E. Donnelly, R. Webb, Radiation Effects 36 (1978) 1.
6. W.F. Savage, A.H. Aronson, Weld. J. 45 (2) (1966) 85s.
7. M. Urbassaek, P. Sigmund, Appl. Phys. A 35 (1984) 19.