Fixed-polarizer ellipsometry: A simple technique to measure the thickness of very thin films

Optical Engineering

Volumn 38, Issue 5, 1999, Pages 902-907

  Trotter, Brian ^a   Moddel, Garret ^a,c   Ostroff, Rachel ^b   Bogart, Gregory R ^b  

^a UCB 450   (United States)

^b BioStar Inc   (United States)

^c UNIVERSITY OF COLORADO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRY; MATRIX ALGEBRA; SUBSTRATES; THICKNESS MEASUREMENT; THIN FILMS;

FIXED-POLARIZER ELLIPSOMETRY; OPTICAL IMMUNOASSAYS;

OPTICAL FILMS;

EID: 0032686011     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.602049     Document Type: Article

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