Effect of surface roughness on magnetic properties of Fe films deposited by dual ion beam sputtering

Thin Solid Films

Volumn 343-344, Issue 1-2, 1999, Pages 67-70

  Iwatsubo, S ^a   Takahashi, T ^b   Naoe, M ^c  

^a TOYAMA INDUSTRIAL TECHNOLOGY CENTER   (Japan)

^b UNIVERSITY OF TOYAMA   (Japan)

^c TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Dual ion beam sputtering; Fe films; Magnetic properties; Surface morphology

Indexed keywords

COERCIVE FORCE; FILM GROWTH; ION BEAMS; ION BOMBARDMENT; IRON; MAGNETIC FILMS; MAGNETIZATION; MORPHOLOGY; SPUTTER DEPOSITION; SURFACE ROUGHNESS;

DUAL ION BEAM SPUTTERING;

METALLIC FILMS;

EID: 0032685967     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01705-2     Document Type: Article

References (4)

1. A. Fukizawa, N. Naoe, IEEE Trans. Magn. 24 (6) (1988) 3078.
2. M. Naoe, Y. Yamaga, N. Terada, IEEE Trans. Magn. MAG 21 (1985) 1900.
3. N. Ishiwata, C. Wakabayashi, T. Matsumoto, EKE Trans. Magn. 24 (6) (1988) 3078.
4. S. Iwatsubo, T. Takahashi, M. Naoe J. Appl. Phys. 81 (8) (1997) 5802.