Enhancement of hierarchical mask data design system (PROPHET)

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3748, Issue , 1999, Pages 196-204

  Watanabe, T ^a   Tsujimoto, E ^a   Maeda, K ^a   Fukuda, H ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; COMPUTER SIMULATION; IMAGE ANALYSIS; INTEGRATED CIRCUIT LAYOUT; SEMICONDUCTOR DEVICE MANUFACTURE;

AERIAL IMAGE CORRECTION; HIERARCHICAL MASK DATA DESIGN SYSTEMS; OPTICAL COHERENT APPROXIMATION (OCA);

MASKS;

EID: 0032685560     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.360191     Document Type: Conference Paper

References (5)