Stimulated orientation of Si films by solid-phase recrystallization on a ZnS film/glass substrate

Journal of the Electrochemical Society

Volumn 146, Issue 4, 1999, Pages 1593-1596

  Unagami, Takashi ^a  

^a TEIKYO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL ORIENTATION; CRYSTALLIZATION; SEMICONDUCTING GLASS; SEMICONDUCTING SILICON; SEMICONDUCTING ZINC COMPOUNDS;

SILICON FILM; SOLID PHASE RECRYSTALLIZATION;

SEMICONDUCTING FILMS;

EID: 0032684005     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1391810     Document Type: Article

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