Wide-scale surface characterization by combination of scanning force microscopy, white light interferometry and light scattering

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3739, Issue , 1999, Pages 355-362

  Gliech, Stefan ^a   Duparre, Angela ^a   Recknagel, Rolf Juergen ^a   Notni, Gunther ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; INTERFEROMETRY; LIGHT SCATTERING;

ANGLE RESOLVED SCATTERING (ARS);

ROUGHNESS MEASUREMENT;

EID: 0032683311     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (10)