Measuring the effective channel length of the deep submicron MOSFET and channel broadening effect

Biennial University/Government/Industry Microelectronics Symposium - Proceedings

Volumn , Issue , 1999, Pages 176-181

  Chung, Sang Hun ^a   Carns, Tim ^a   Lee, Sung Kwon ^a   DeBruler, Lee ^a   Berg, John E ^a  

^a Zilog Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; MODULATION; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING;

CHANNEL BROADENING EFFECTS; CHARGE DENSITY DISTRIBUTIONS;

MOSFET DEVICES;

EID: 0032682870     PISSN: 07496877     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (9)