|
Volumn 3729, Issue , 1999, Pages 250-254
|
Application of As-S-Se chalcogenide inorganic resists in diffractive optics
|
Author keywords
[No Author keywords available]
|
Indexed keywords
COMPUTER SIMULATION;
DIFFRACTION GRATINGS;
DIFFRACTIVE OPTICS;
HOLOGRAPHIC OPTICAL ELEMENTS;
MECHANICAL PROPERTIES;
OPTICAL PROPERTIES;
OPTICS;
PHOTOSENSITIVITY;
RAMAN SPECTROSCOPY;
SEMICONDUCTING SELENIUM COMPOUNDS;
THERMODYNAMIC STABILITY;
ARSENIC SULFUR SELENIUM CHALCOGENIDE;
CHEMICAL PROPERTIES;
INORGANIC RESISTS;
LIGHTSENSITIVITY PROPERTIES;
PHOTORESISTS;
|
EID: 0032682637
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Article |
Times cited : (3)
|
References (20)
|