Laser damage of optical coatings from UV to deep UV at 193 nm

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3578, Issue , 1999, Pages 54-63

  Dijon, J ^a   Quesnel, E ^a   Pelle, C ^a   Thielsch, R ^a  

^a CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; INTERFACES (MATERIALS); LASER DAMAGE; OPTICAL COATINGS; SPUTTERING; SUBSTRATES; THIN FILMS; ULTRAVIOLET RADIATION;

DEEP ULTRAVIOLET OPTICAL MATERIALS; FLUORIDE BASE COATINGS; ION BEAM SPUTTERING;

OPTICAL FILMS;

EID: 0032682138     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.344439     Document Type: Conference Paper

References (19)