Microarray selective epitaxy (MASE) for integrated photonic devices

Conference Proceedings - International Conference on Indium Phosphide and Related Materials

Volumn , Issue , 1999, Pages 543-546

  Kudo, Koji ^a   Nakazaki, Tadashi ^a   Yamaguchi, Masayuki ^a  

^a NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MASKS; METALLORGANIC VAPOR PHASE EPITAXY; OPTICAL WAVEGUIDES; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTOR QUANTUM WELLS;

MICROARRAY SELECTIVE EPITAXY (MASE);

INTEGRATED OPTOELECTRONICS;

EID: 0032681463     PISSN: 10928669     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (7)