Transfer of thin InP films onto silicon substrate by proton implantation process

Conference Proceedings - International Conference on Indium Phosphide and Related Materials

Volumn , Issue , 1999, Pages 26-27

  Jalaguier, E ^a   Aspar, B ^a   Pocas, S ^a   Michaud, J F ^a   Papon, A M ^a   Bruel, M ^a  

^a CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; BONDING; CRYSTALLINE MATERIALS; DELAMINATION; HYDROGEN; ION IMPLANTATION; PROTONS; SEMICONDUCTING INDIUM PHOSPHIDE; SILICON WAFERS; SOLAR CELLS; SUBSTRATES; THIN FILMS;

PROTON IMPLANTATION; WAFER BONDING;

SEMICONDUCTING FILMS;

EID: 0032681461     PISSN: 10928669     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (5)