High-speed monitoring and control of CVD metal-organic precursors using FT-IR spectroscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3535, Issue , 1999, Pages 24-31

  Marran, David F ^a   Nelson, Chad M ^a   Guido, Louis J ^a   Gaffey, Brendan ^a  

^a Advanced Fuel Research   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VARIABLES CONTROL; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MONITORING; PROCESS CONTROL; REAL TIME SYSTEMS;

HIGH SPEED MONITORING; METAL ORGANIC PRECURSOR FEED RATES;

FOURIER TRANSFORM INFRARED SPECTROSCOPY;

EID: 0032681115     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (7)