TIS, AFM, interferometry & optical profiler correlation of surface roughness on silicon wafers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3619, Issue , 1999, Pages 128-134

  Taylor, Patrick A ^a   Dawson, Dean J ^a  

^a Mitsubishi Silicon America   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; INTERFEROMETRY; OPTICAL CORRELATION; ROUGHNESS MEASUREMENT; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DOPING; SURFACE ROUGHNESS;

MICROROUGHNESS; OPTICAL PROFILER; TOTAL INTEGRATED SCATTER (TIS);

SILICON WAFERS;

EID: 0032680498     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (4)