Theoretical investigation of pulsed microwave discharge in nitrogen

Plasma Sources Science and Technology

Volumn 8, Issue 3, 1999, Pages 404-411

  Baeva, M ^a   Luo, X ^a   Pfelzer, B ^a   Uhlenbusch, J ^a  

^a HEINRICH HEINE UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; DIFFUSION; ELECTRIC FIELDS; GROUND STATE; IONIZATION; KINETIC THEORY; MATHEMATICAL MODELS; MAXWELL EQUATIONS; MICROWAVES; MOLECULAR DYNAMICS; NITROGEN;

BOLTZMANN EQUATION; FREE ELECTRON DIFFUSION; IONIZATION FREQUENCY; KINETICS COUPLING; PULSED MICROWAVE DISCHARGE;

GLOW DISCHARGES;

EID: 0032680366     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/8/3/310     Document Type: Article

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