Si3N4/SiO2/Si waveguide grating for fluorescent biosensors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3620, Issue , 1999, Pages 109-116

  Voirin, Guy ^a   Gehriger, Daniel ^a   Parriaux, Olivier M ^a   Usievich, Boris ^a  

^a CSEM   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

BIOSENSORS; DIFFRACTION GRATINGS; FLUORESCENCE; LIGHT INTERFERENCE; MATHEMATICAL MODELS; SILICA; SILICON; SILICON COMPOUNDS; SUBSTRATES; THICK FILMS;

CORRUGATION GRATING; FLUORESCENT BIOSENSORS; WAVEGUIDE GRATING;

OPTICAL WAVEGUIDES;

EID: 0032679677     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.343720     Document Type: Conference Paper

References (10)