Metastability of phosphorus- or boron doped a-Si:H films

Materials Research Society Symposium - Proceedings

Volumn 507, Issue , 1999, Pages 649-654

  St'ahel, P ^a   Roca i Cabarrocas, P ^a   Sladek, P ^a   Theye, M L ^a  

^a ECOLE POLYTECHNIQUE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; BORON; CHEMICAL ACTIVATION; COMPOSITION EFFECTS; CRYSTAL DEFECTS; ELECTRIC CONDUCTIVITY OF SOLIDS; HYDROGENATION; PHOSPHORUS; SEMICONDUCTING FILMS; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING; THERMAL EFFECTS;

LIGHT SOAKING; METASTABLE DEFECTS;

AMORPHOUS FILMS;

EID: 0032679075     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (25)