Simulation of point defect diffusion in semiconductors

Solid State Phenomena

Volumn 69, Issue , 1999, Pages 513-518

  Velichko, O I ^a   Fedotov, A K ^b  

^a BELARUSIAN STATE UNIVERSITY OF INFORMATICS AND RADIOELECTRONICS   (Belarus)

^b BELARUSIAN STATE UNIVERSITY   (Belarus)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION IN SOLIDS; INTERFACES (MATERIALS); POINT DEFECTS; RESIDUAL STRESSES; SUBSTRATES;

SELF-INTERSTITIALS;

SEMICONDUCTING SILICON;

EID: 0032678920     PISSN: 10120394     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.4028/www.scientific.net/ssp.69-70.513     Document Type: Article

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3. K. V. Ravi, Imperfections and Impurities in Semiconductor Silicon (Wiley-Interscience Publication, New York, 1981).
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