A self-consistent one-dimensional modeling and simulation of solenoidal inductively coupled plasma discharge

Surface and Coatings Technology

Volumn 114, Issue 1, 1999, Pages 60-64

  You, K I ^a   Yoon, N S ^a   Hwang, S M ^a  

^a Korea Basic Science Institute (KBSI)   (South Korea)

Author keywords

Modeling; Plasma discharge; Simulation

Indexed keywords

ARGON; CHARGED PARTICLES; ELECTRIC FIELDS; ELECTROMAGNETIC WAVES; ELECTRONS; ENERGY ABSORPTION; KINETIC THEORY; MATHEMATICAL MODELS; PLASMA DENSITY; PLASMA HEATING; PRESSURE; TEMPERATURE;

CONTINUITY EQUATION; DISCHARGE PHYSICS; INDUCTIVELY COUPLED PLASMA; MOMENTUM EQUATION; SOLENOIDAL; TEMPERATURE EQUATION;

PLASMAS;

EID: 0032678639     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00022-5     Document Type: Article

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